| 摘要 |
PROBLEM TO BE SOLVED: To easily change bright field illumination and inclined lighting over to each other without intercepting illumination light with respect to a sample. SOLUTION: A lighting system 5 capable of changing the bright field illumination and the inclined lighting over to each other for the sample includes an aperture diaphragm 14 for restricting an illumination light flux for the sample around an illumination optical axis OA2; and a shading mechanism 30, having a shading sheet 33 shading the illumination light flux, inserting and detaching the shading sheet 33 into and out of the illumination optical path restricted by the aperture diaphragm 14, and asymmetrically shading the illumination light flux with respect to the illumination optical axis OA2, corresponding to the insertion amount of the shading sheet 33 into the illumination optical path. COPYRIGHT: (C)2009,JPO&INPIT
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