发明名称 |
Method, Computer Program, Apparatus and System Providing Printing for an Illumination Mask for Three-Dimensional Images |
摘要 |
A method able to provide illumination source parameters for illumination of a lithographic mask in order to project a three-dimensional image into a resist system. Source intensities of incident beams are determined using a near linear program and responsive to an allowed range of variation. Computer program, apparatus and system are detailed and variations are described.
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申请公布号 |
US2009021718(A1) |
申请公布日期 |
2009.01.22 |
申请号 |
US20070778750 |
申请日期 |
2007.07.17 |
申请人 |
MELVILLE DAVID O S;ROSENBLUTH ALAN E;TIAN KEHAN |
发明人 |
MELVILLE DAVID O. S.;ROSENBLUTH ALAN E.;TIAN KEHAN |
分类号 |
G03B27/54 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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