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发明名称
VORRICHTUNG ZUR ERZEUGUNG VON MIKROSTRUKTUREN
摘要
申请公布号
DE502005006144(D1)
申请公布日期
2009.01.15
申请号
DE200550006144T
申请日期
2005.04.13
申请人
SCHOTT AG
发明人
OSTENDARP, HEINRICH
分类号
B23Q1/58;B23Q1/34;B23Q5/027;B23Q5/32
主分类号
B23Q1/58
代理机构
代理人
主权项
地址
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