| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning apparatus driven in multiple axial directions, suitable for a scanning probe microscope and attaining high-speed measurement by preventing a decrease in resonance frequency in the axial direction in high-speed driving due to crosstalk caused by combining a moving mechanism to be driven at high speed with a moving mechanism to be driven at low speed. SOLUTION: A scanning probe microscope uses the positioning apparatus M1 having a unit 3 to be driven in XY directions, having a substantially square form in plane geometry at the center of a plane in the XY directions and having a first elastic support that bends in an X-axis direction at least on one side of the square form and a second elastic support that bends in a Y-axis direction at least on one side orthogonal to the side; and a support part 9 for supporting a stage part 1 in the XY directions such that its facing surface can face, in parallel, the facing surface of the unit 3 to be driven in the XY directions. The positioning apparatus has a clearance of predetermined thickness between the surface corresponding to the unit 3 to be driven in the XY directions at least and the facing surface of the support part 9 that faces the surface, and the clearance is filled with a viscosity agent 10. COPYRIGHT: (C)2009,JPO&INPIT
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