| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method of a surface to be measured, capable of extracting a pitching error or a rolling error, and measuring highly accurately. SOLUTION: A tilt motion error equivalent to deflection of a rotation axis when rotating the surface to be measured is required to be removed for measuring the surface to be measured highly accurately. No method has been available for removing simply the tilt motion error in conventional technologies. In this invention, while rotating a member equipped with the surface to be measured, a surface normal angle on the first measuring point is measured two-dimensionally by the first two-dimensional angle sensor, and a surface normal angle on the second measuring point is measured two-dimensionally by the second two-dimensional angle sensor, and the tilt motion error can be removed from a measured value by the second two-dimensional angle sensor based on a measured value by the first two-dimensional angle sensor. COPYRIGHT: (C)2009,JPO&INPIT
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