| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus of simple constitution, which is excellent in thermal efficiency and throughput, and can quickly elevate the temperature of an object to be treated. SOLUTION: This apparatus is a high temperature vacuum furnace equipped with a main heating chamber 21 for heating an object to be treated to a temperature of 1,000-2,400°C, a preliminary heating chamber 22 adjoining the main heating chamber 21, and a moving mechanism 27 for moving the object to be treated between the preliminary heating chamber 22 and the main heating chamber 21. In the inside of the main heating chamber 21, a mesh heater 33 for heating the object to be treated and a first multilayer heat-reflecting metal plate 41 arranged so as to reflect the heat from the mesh heater 33 toward the object to be treated are provided. The moving mechanism 27 is equipped with a second multilayer heat-reflecting metal plate 42 movable with the object to be treated. When the object to be treated is located in the preliminary heating chamber 22, the second multilayer heat-reflecting metal plate 42 severs the main heating chamber 21 from the preliminary heating chamber 22, and a part of the heat generated from the mesh heater 33 is fed to the preliminary heating chamber 22 through the second multilayer heat-reflecting metal plate 42. COPYRIGHT: (C)2009,JPO&INPIT
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