METAL FILM POLISHING LIQUID AND POLISHING METHOD

摘要

A metal film polishing liquid comprising, providing that the total amount of metal film polishing liquid is 100 wt.%, 7.0 wt.% or more of a metal oxidizing agent, a water-soluble polymer, an oxidized metal dissolving agent, a metal corrosion preventive agent and water. The water-soluble polymer has a weight average molecular weight of 150,000 or greater and is at least one member selected from among a polycarboxylic acid, a salt of polycarboxylic acid and a polycarboxylic ester. The metal film polishing liquid and polishing method using the same would realize high-speed polishing even under a low polishing load of 1 psi or less, excellence in the planarity of the film having undergone the polishing and high polishing speed from the initial stage of polishing operation.