| 摘要 |
The invention relates to a probe for an optical near field microscope, said probe comprising a planar carrier carrying a probe tip at least partially consisting of a transparent material. The invention also relates to a method of producing one such probe. The object of the invention is to provide a probe for an optical near field microscope and a method for the production thereof, whereby the probe can be produced with high reproducibility according to a simple technology and can have a simple but efficient light supply. According to the invention, the object is solved with a probe of the type mentioned in the introduction such that the carrier comprises an optical waveguide. With respect to the method for probe production the object mentioned above is solved according to the invention by a method comprising the following steps: a coating comprising an optical waveguide is applied to a substrate in a first step; a transparent layer is applied in a second step, such that the optical waveguide is arranged between the substrate and the transparent layer; the transparent layer is masked in at least one region above the probe tip in a third step; and the transparent layer is etched, forming the probe tip, in a fourth step.
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