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发明名称
Vorrichtung zum Transportieren und Bearbeiten von Substraten
摘要
申请公布号
DE60324746(D1)
申请公布日期
2009.01.02
申请号
DE20036024746
申请日期
2003.08.29
申请人
APPLIED MATERIALS INC.
发明人
RICE, MICHAEL R.;HUDGENS, JEFFREY C.;ENGLHARDT, ERIC A.;LOWRANCE, ROBERT B.;ELLIOTT, MARTIN R.
分类号
B65G49/06;H01L21/00;B65G49/07;H01L21/677;H01L21/68
主分类号
B65G49/06
代理机构
代理人
主权项
地址
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