发明名称 Method for Producing Electronic Components and Pressure Sensor
摘要 A method produces electronic components in particular electronic sensors for pressure and differential pressure measurement. Firstly, the semiconductor structure of the electronic components is produced on a wafer. An insulating oxide layer is then applied. A protective metal layer is subsequently applied. The metal layer is applied in sections only in those regions of the wafer in which no splitting, for example by mechanical separation, occurs later. The electronic components thus formed in the wafer are then divided up into individual elements.
申请公布号 US2009004766(A1) 申请公布日期 2009.01.01
申请号 US20070279370 申请日期 2007.01.30
申请人 GRUNDFOS MANAGEMENT A/S 发明人 KROG JENS PETER;ERIKSEN GERT FRIIS;DYRBYE KARSTEN
分类号 H01L21/50 主分类号 H01L21/50
代理机构 代理人
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