| 摘要 |
<p>A baking apparatus (50a) comprises a baking chamber (40a) and guide rolls (11a-18a) which are provided in the baking chamber (40a) and the rotating shafts (S) of which are arranged parallel to each other. While a film substrate (5) contained in the baking chamber (40a) is passed through the guide rolls (11a-18a) in order, a thin-film (6) on the film substrate (5) is baked. The guide rolls (11a-18a) are spirally disposed in such an order that the film substrate (5) passes through them.</p> |
