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发明名称
METHOD AND APPARATUS FOR EXPOSURE
摘要
申请公布号
GB2155650(B)
申请公布日期
1988.11.16
申请号
GB19850003115
申请日期
1985.02.07
申请人
* CANON KABUSHIKI KAISHA
发明人
HIROSHI * ECHIZEN;AKIYOSHI * SUZUKI
分类号
G03F7/20;(IPC1-7):G03B27/74
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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