ELECTRODE OF ALUMINUM-ALLOY FILM WITH LOW CONTACT RESISTANCE, METHOD FOR PRODUCTION THEREOF, AND DISPLAY UNIT

摘要

An electrode with low contact resistance using Al alloy film capable of reducing resistance, manufacturing method thereof, and display device are provided to reduce generation of a display error by forming precipitate of an alloying element on a surface. An electrode with low contact resistance is made of an Al alloy film which directly contacts with a transparent conductive oxide. The Al alloy film has a metal element more inert than Al with a rate of 0.1 to 1.0 atom%. An Al alloy film surface directly contacted with the transparent conductive oxide of the Al alloy film has a concavo-convex which is 5nm or greater as a maximum height rough(Rz).