| 摘要 |
A laser machining apparatus using an air floating stage is provided to prevent the contamination and scratch of a substrate by including a floating unit. A laser machining apparatus using an air floating stage comprises a light source(100) generating the light, scan parts(103,104,200) which reflect the light generated in the light source to form a predetermined refraction angle, optical units(105,106) guiding the light reflected in the scan part to a substrate supported by a stage(400), a first light-receiving part(108) which receives the light having the initial optical path among the effective optical paths reflected in the scan part, optical path recognition parts(108,109) comprising a second light-receiving part(109) which receives the light having the final optical path, a controller(110) controlling the light source with the synchronizing signal received in the optical path recognition part, and an external information part(120) providing the controller with information about the task performed on the substrate. |
