发明名称 |
MASS FLOW VERIFIERS CAPABLE OF PROVIDING DIFFERENT VOLUMES, AND RELATED METHODS |
摘要 |
<p>Embodiments of the present disclosure are directed to systems, methods, and apparatus, including software implementation, useful for high-precision measurement of mass flow rate over a large range of flows by using multiple volumes, each having a different and selected size. Use of a single manometer can facilitate reduced cost, and the use of multiple chamber volumes that are sized according to sub-flow ranges within the overall range of the mass flow verifier, or a related device under test, can provide high accuracy while reducing deleterious effects of noise in the flow measurement.</p> |
申请公布号 |
WO2009002917(A1) |
申请公布日期 |
2008.12.31 |
申请号 |
WO2008US67870 |
申请日期 |
2008.06.23 |
申请人 |
MKS INSTRUMENTS, INC.;DING, JUNHUA;ZARKAR, KAVEH, H. |
发明人 |
DING, JUNHUA;ZARKAR, KAVEH, H. |
分类号 |
G01F25/00 |
主分类号 |
G01F25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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