发明名称 Elastic boundary wave device, resonator, and filter
摘要 An elastic boundary wave device includes a LiNbO3 substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where "theta" is a rotation Y cut angle of the substrate, "a" is a ratio of copper density with respect to a density of a material used as the electrode, "lambda" is a wavelength of the elastic wave excited by the electrode, "h" is a film thickness of the electrode, "H" is a thickness of the silicon oxide film.
申请公布号 US7471171(B2) 申请公布日期 2008.12.30
申请号 US20070711893 申请日期 2007.02.28
申请人 FUJITSU MEDIA DEVICES LIMITED;FUJITSU LIMITED 发明人 MIURA MICHIO;MATSUDA SATORU;MATSUDA TAKASHI;UEDA MASANORI;MITOBE SEIICHI
分类号 H03H9/25;H03H9/64 主分类号 H03H9/25
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