Device for determining position of structures on substrate, comprises multiple stations which are enclosed by housing, filter fan unit to produce air flow in housing and air-channeling elements at one medium of flow in housing

摘要

The device comprises multiple stations (20,32,36,38), which are enclosed by a housing (50). The housing has a filter fan unit (41), which produces an air flow (70) in the housing. Multiple motor adjusting air-channeling elements (71) are provided in the housing. One of station is movably adjusted as a function of position. The air-channeling elements are arranged at one medium of flow in the housing. The movably adjusted station is provided with a moving measuring table in X-coordinate direction and in Y-coordinate direction.