DETECTION DEVICE FOR ELECTRON MICROSCOPE

摘要

Described is a detection device designed to be installed in a scanning electron microscope (2) downstream of a sample (3) to be analysed using an electron beam (F) passing through the sample. The device comprises a detection element (4) divided into a plurality of portions which subtend different angles with the sample. Each portion generates a signal dependent on the number of electrons which pass through the sample and are deflected in the angle subtended by that detector portion.