发明名称 VORRICHTUNG UND VERFAHREN ZUR HERMETISCHEN ABDICHTUNG EINES HOHLRAUMS IN EINEM ELEKTRONISCHEN BAUTEIL
摘要 To hermetically seal a cavity in a microelectronic component, a cap located in a sealing device is positioned above the orifice opening into the cavity. The cap plastically deforms to seal the cavity. The sealing device includes a cavity permitting the cavity of the microelectronic component to be filled. The sealing device slides along the component so as to be positioned opposite either the filling cavity, or the cap.
申请公布号 DE602005010904(D1) 申请公布日期 2008.12.18
申请号 DE20056010904T 申请日期 2005.12.13
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL D'ETUDES SPATIALES 发明人 LAI, AYMERIC
分类号 B81C3/00;H01L23/28 主分类号 B81C3/00
代理机构 代理人
主权项
地址