PROCESS FOR THE PRODUCTION OF SILICON LAYERS,申请号US19770795844-传众专利搜索

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发明名称	PROCESS FOR THE PRODUCTION OF SILICON LAYERS
摘要
申请公布号	US4113548(A)	申请公布日期	1978.09.12
申请号	US19770795844	申请日期	1977.05.11
申请人	SIGMUND, HERMANN	发明人	SIGMUND, HERMANN
分类号	C30B15/00;C30B15/06;C30B19/00;C30B29/06;C30B29/64;H01L21/208;(IPC1-7):H01L21/36;H01L21/20	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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