| 摘要 |
PURPOSE:To reduce the size and weight of a color solid image pickup element and reduce the cost of the element by forming a color separation filter directly through an intermediate transparent film on a passivation film having rugged surface formed on the surface including the light receiving portion of the element. CONSTITUTION:The first and the second polycrystalline silicon electrodes 23, 24 for transferring charge are formed through an SiO2 insulating film 22 on a p-type silicon substrate 21, and a passivation film 25 made of phosphosilicate glass, borosilicate glass, aluminosilicate glass, silicon nitride film or the like is coated on the entire surface thereof. Since further expanded rugged surface is produced due to the existence of the electrodes 22, 23 at this time, an intermediate film 27 made of transparent organic material is coated to smoothen the surface thereon. After the surface is thus smoothened, a color separating filter 26 is formed on the entire surface. Thus, it can simplify not only the image pickup element but the peripheral circuit thereof so as to reduce the size and weight of the element remarkably. |
