发明名称 WASHING CELL
摘要 PURPOSE:To make it possible to maintain necessary water depth through effecting a suitable control of overflow rate without causing any damage of washed material, by providing the water overflow section of a washing cell with a water jetting nozzle which jets a fluid upwardly in the form like a belt or film. CONSTITUTION:A washing cell 10 used in processes such as continuous soldering of semiconductor products is provided at its bottom with a water supply port 14 through which rinsing water 12 is supplied. The cell 10 is provided also with overflow sections 16 and 18 at its both longitudinal ends. Water jetting nozzles 20, 22 having slit-shaped nozzles are fixed to the inner side of respective overflow sections 16 and 18 and are adapted to jet water or air upwardly in the form of films. The rate of overflow of rinsing water 12 is controlled by adjusting the rate of jetting of the water or air thereby to maintain the necessary depth or level of water 12. The material 26 to be washed is carried by a carrier jig 24 and is conveyed out of the cell over the overflow section 18.
申请公布号 JPS57160131(A) 申请公布日期 1982.10.02
申请号 JP19810045551 申请日期 1981.03.30
申请人 HITACHI SEISAKUSHO KK 发明人 TOYOOKA MORIO
分类号 B08B3/04;H01L21/304 主分类号 B08B3/04
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