| 摘要 |
PURPOSE:To bypass a leakage magnetic field from a magnet for driving a motor to the magnetic shield side, and to reduce an effect on a magneto- sensitive section by forming a magnetic shield into a substrate to which the magneto-sensitive section is shaped. CONSTITUTION:A ferromagnetic alloy consisting of nickel and cobalt is deposited under a vacuum extending over the whole surface of the surface of a glass substrate 1, and shielding sections 11 and 12 continuing to terminal sections 4 and 6 are formed on both sides of magneto-sensitive sections 2 and 3 by using a photoengraving technique. Accordingly, since the shielding sections 11 and 12 are shaped, informations regarding revolution having high precision are acquired, and the shielding sections are formed at the same time as the terminal sections and the magneto-sensitive sections through the photoengraving technique,thus manufacturing a magnetic sensor through processes quite the same as conventional devices. |
