| 摘要 |
PURPOSE:To prevent the generation of a coating stain by forming a curved part having >=1mm radius of curvature to the edge of the inside circumferential surface of the central hole of a substrate and the surface of the substrate. CONSTITUTION:The curved part 3 having >=1mm radius of curvature is formed to the edge of the central hole 2 of the substrate 1 for spin coating and the surface of the substrate. The excess resist near the central part of the dropped resist is thereby quickly dropped through the central hole and the remaining of the resist at the edge is obviated. The splashing of the residual resist and the consequent generation of the coating stain are obviated and therefore a good disk having no deterioration of the SN ratio is obtd.
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