| 摘要 |
PURPOSE:To shorten a bonding time and to reduce the rate of improper bonding occurrence by not directly applying a bonding load by a drive force but applying a bonding load determined by a pressing load mechanism when a capillary is contacted with a bonding material. CONSTITUTION:A large drive force is applied by a spring 10 having a large spring constant to the first arm 7 rockably mounted through a supporting shaft 8 to operate at a high speed. When a capillary 14 is contacted with a bonding material by the drive force, a bonding load is determined by the spring 10 of a pressing load mechanism independently from the drive force of the spring 10 by the mechanism of the spring 18 provided between the first arm 7 and the second arm 11 rockably mounted through the shaft 13 to the first arm. |
