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发明名称
MATERIAL DEPOSITION
摘要
申请公布号
GB8628581(D0)
申请公布日期
1987.01.07
申请号
GB19860028581
申请日期
1986.11.28
申请人
GENERAL ELECTRIC CO PLC
发明人
分类号
C23C16/04;C23C16/30;C23C16/48;H01L21/316;H01L21/86
主分类号
C23C16/04
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代理人
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