| 摘要 |
PURPOSE:To make it possible to measure the position within the three- dimensional space of (n) pieces of marks, by performing the setting of correspondence between each of (n) pieces of the marks and each image on a plane. CONSTITUTION:The images of marks M0-M3 on a plane 2 are picked up by a video camera 1. An image processing apparatus 3 processes the image output signals of the camera 1 to calculate the position (xsii, etai)(i=0-3) of each mark in an image coordinates system. At every possible corresponding relation between said image position and the two-dimensional position (aj, bj), (j=0-3) in the plane 2, xsi=(A+aC+bD)/(1+aG+bH) and eta=(B+aE+bF)/(1+aG+bH) are calculated by a calculator to calculate parameters A-H. On the basis of said parameters, the vector L in an a-axis direction, the vector M in a b-axis direction, an origin vector P and, further, measurement W=¦L<1>-1¦+¦M<2>-1¦+¦L.M¦ are calculated by a calculator 5 and correspondence relation minimizing the measurement W is selected by a selector 5. Calculation is performed on the basis of vectors L, M, P in the correspondence relation and the two-dimensional position of the marks by a calculator 6 and the three- dimensional position (x1, yi, zi) of each mark is calculated.
|
