发明名称 PHOTORESIST COMPOSITION
摘要 A photoresist composition comprising: a resin soluble in an aqueous alkaline solution, having units of an aliphatic cyclic hydrocarbon main frame and units derived from maleic anhydride and/or units derived from a maleimide; and a photosensitive agent in a sufficient amount to promote or hinder the solubility of said resin in an aqueous alkaline solution upon exposure to active radiation so as to create a substantial difference in the solubility as between an exposed portion and a non-exposed portion and to form a positive or negative image by subsequent development with an aqueous alkaline solution.
申请公布号 WO8907786(A1) 申请公布日期 1989.08.24
申请号 WO1989JP00159 申请日期 1989.02.17
申请人 TOSOH CORPORATION 发明人 YAMAMOTO, TAKASHI;TODOKO, MASAAKI;SEITA, TORU;NAGAOKA, KYOKO;MATSUMURA, KOSABURO
分类号 G03F7/012;G03F7/023 主分类号 G03F7/012
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