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发明名称
INSPECTING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01301188(A)
申请公布日期
1989.12.05
申请号
JP19880132111
申请日期
1988.05.30
申请人
SONY CORP
发明人
OHIGATA KOJI
分类号
G01R31/26;G01R31/302;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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