| 摘要 |
PURPOSE:To maintain the clean state of a high vacuum chamber by fitting a means to ionize molecular beams sucked from a low vacuum chamber into the high vacuum chamber and a means to deflect the trajectory of ionized particles to a means to connect the high vacuum chamber to the low vacuum chamber. CONSTITUTION:Plural differential exhausting means 13 to regulate pressure are fitted to a connecting means 11 to connect a high vacuum chamber 16 to a low vacuum chamber 14. An ionizing means 16 to ionize molecular beams 18 sucked from the low vacuum chamber 14 into the high vacuum chamber 15 and a deflecting means 19 to deflect the trajectory of ionized particles 18a are also fitted to the connecting means 11. Since the molecular beams 18 can be prevented from flowing into the high vacuum chamber 15, the clean state of the chamber 15 can be maintained. |
