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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02296349(A)
申请公布日期
1990.12.06
申请号
JP19890116148
申请日期
1989.05.11
申请人
MATSUSHITA ELECTRON CORP
发明人
TSUURA KATSUHIKO
分类号
H01L21/66;H01L21/82
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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