| 摘要 |
<p>PURPOSE:To provide the title equipment intended to reduce its operational cost, designed to install a preheating heat exchanger between a demineralized water tank and a heat exchanger. CONSTITUTION:The water in a tank 1A is fed via a pump 2B to a waste heat exchanger 9 and returned to the tank 1A, and the warm water from the tank 1A is put to flow control with a valve 7A interlocked with a thermosensor 6A and fed to a preheating heat exchanger 8. In this state, the demineralized water from a demineralized water tank l is warmed with the preheating heat exchanger 8, and fed to a heat exchanger 3 where a steam B put to flow control with a valve 7 interlocked with a thermosensor 6 is flowing. The resulting demineralized water heated is filtered through a filter 4 and fed to a production equipment 5 for semiconductor devices.</p> |
