MOLECULAR BEAM EPITAXY METHOD AND COMPOUND SEMICONDUCTOR FILM,申请号JP19910188583-传众专利搜索

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发明名称	MOLECULAR BEAM EPITAXY METHOD AND COMPOUND SEMICONDUCTOR FILM
摘要
申请公布号	JPH0532482(A)	申请公布日期	1993.02.09
申请号	JP19910188583	申请日期	1991.07.29
申请人	HITACHI LTD	发明人	OBE ISAO;BUSSHU TERUO
分类号	C23C14/32;C23C16/44;C23C16/452;C23C16/455;C30B23/08;C30B25/02;H01L21/203	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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