VACUUM TREATING DEVICE,申请号JP19910232274-传众专利搜索

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发明名称	VACUUM TREATING DEVICE
摘要
申请公布号	JPH0551749(A)	申请公布日期	1993.03.02
申请号	JP19910232274	申请日期	1991.08.20
申请人	OMI TADAHIRO	发明人	OMI TADAHIRO;KONISHI NOBUHIRO
分类号	C23C16/44;H01L21/203;H01L21/285;H01L21/677;H01L21/68	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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