发明名称 Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates
摘要 The invention includes a method of forming a structure over a semiconductor substrate. A silicon dioxide containing layer is formed across at least some of the substrate. Nitrogen is formed within the silicon dioxide containing layer. Substantially all of the nitrogen within the silicon dioxide is at least 10 Å above the substrate. After the nitrogen is formed within the silicon dioxide layer, conductively doped silicon is formed on the silicon dioxide layer.
申请公布号 US2008261388(A1) 申请公布日期 2008.10.23
申请号 US20080145772 申请日期 2008.06.25
申请人 发明人 BEAMAN KEVIN L.;MOORE JOHN T.
分类号 H01L21/3205;H01L21/31;H01L21/336;H01L21/469;H01L21/8234;H01L21/8238;H01L21/8239;H01L21/8247;H01L27/105;H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/3205
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