发明名称 RESIST STRIPPING AGENT AND METHOD FOR MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To provide a resist stripping agent having excellent stripping property, safeness and corrosion prevention property. SOLUTION: The resist stripping agent contains 2-alkoxy-N,N-dimethylacetoamide expressed by formula (1) (wherein R<SP>1</SP>represents an alkyl group) and water, in a weight ratio of the 2-alkoxy-N,N-dimethylacetoamide to water ranging from 30:70 to 100:0. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008256991(A) 申请公布日期 2008.10.23
申请号 JP20070099971 申请日期 2007.04.06
申请人 IDEMITSU KOSAN CO LTD 发明人 MATSUO SHIGERU;SHIRAKI YASUSHI;FUJIOKA TOYOZOU
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
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