摘要 |
PROBLEM TO BE SOLVED: To provide a resist stripping agent having excellent stripping property, safeness and corrosion prevention property. SOLUTION: The resist stripping agent contains 2-alkoxy-N,N-dimethylacetoamide expressed by formula (1) (wherein R<SP>1</SP>represents an alkyl group) and water, in a weight ratio of the 2-alkoxy-N,N-dimethylacetoamide to water ranging from 30:70 to 100:0. COPYRIGHT: (C)2009,JPO&INPIT |