| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment system wherein system shutdown period can be shortened when its connection configuration is changed. SOLUTION: The substrate treatment system 2 is provided with a plurality of substrate treatment devices 10 and a group control system 7. The group control system 7 includes a configuration information memory device to store configuration information, a plurality of communication devices that communicate with at least one of the substrate treatment devices 10 on the basis of the stored configuration information, and a device information storing device that is connected with one of the communication devices on the basis of the stored configuration information and stores information concerning the substrate treatment devices 10 to communicate with the communication device. The configuration information memory device notifies the communication device of the update of the configuration information when the configuration information is updated. COPYRIGHT: (C)2009,JPO&INPIT |
