发明名称 INSPECTION METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 <p><P>PROBLEM TO BE SOLVED: To collectively inspect a plurality of data holding performances of flip flops. <P>SOLUTION: A clock signal is applied to a plurality of flip flops interconnected in series so as to form a scan chain, predetermined data is input into the plurality of flip flops via a scan chain, and the input data is held in a state where the supply of the clock signal to the plurality of flip flops is stopped for a predetermined time. Then, the clock signal is supplied again, data held by the plurality of flip flops is read via the scan chain, and the input data is compared with the read data, thereby inspecting the data holding performances of the plurality of flip flops. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2008256627(A) 申请公布日期 2008.10.23
申请号 JP20070101230 申请日期 2007.04.09
申请人 KAWASAKI MICROELECTRONICS KK 发明人 SUMITA SAKURAKO
分类号 G01R31/28;H01L21/822;H01L27/04;H03K3/3562 主分类号 G01R31/28
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