| 摘要 |
<p>A driver unit (100j) has a base (110), a movable stage (130) having mounted thereon an object (12) to be driven, an elastic body (120) connecting the base and the stage with each other and having an elasticity to get the stage moving in one direction (Y-axis direction), an actuator (161, 162, 22) causing an oscillatory force to let the stage moving in the one direction in a way resonating at a resonance frequency that is determined depending on both the stage and the elastic body, and a frequency adjuster (170) to adjust the resonance frequency in a dynamic manner.</p> |
