CHLOROTRIFLUORINE GAS GENERATOR SYSTEM

摘要

A ClF<SUB>3 </SUB>gas generation system is provided with supply sources of chlorine ( 3 ) (for example a cylinder of compressed chlorine) and fluorine ( 4 ) (for example a fluorine generator) connected into a gas reaction chamber ( 2 ) enabling generation of ClF<SUB>3 </SUB>gas. The reaction chamber has a valved outlet (C) for the supply of the ClF<SUB>3 </SUB>gas to a process chamber for immediate local use.