AIR KNIFE OF SUBSTRATE TREATING UNIT AND THE SUBSTRATE TREATING UNIT

摘要

PROBLEM TO BE SOLVED: To obtain an air knife, which is an adoptable from the viewpoint of cost and can restrain deterioration of the uniformity of gas which is blown off due to the deformation of slits. SOLUTION: An air knife is used in spraying the dry air into a layer type on a substrate in a substrate treater for performing an etching and is provided with air knife main bodies 51 and 52 and a gas feed piping 53. Internal spacers are respectively formed in the main bodies 51 and 52, and main bodies 51 and 52 are provided with slits. The slits are those formed in the main bodies 51 and 52 for making the air fed into the internal space blow out in a layer form. The piping 53 is one for feeding air in the internal spaces formed in the main bodies 51 and 52 and the amount of the air, which is fed to the internal spaces, can be adjusted.