| 摘要 |
An inertial sensor and an electrical or electronic device are provided to measure angular velocities and accelerations in three axes by using a simple harmonic oscillator, which oscillates in a single axis. Support units are formed on a frame base(111). The frame base is made of a silicon substrate(101). The support unit is made of a silicon layer(103) and arranged at respective corners of the frame base with an insulation layer(102) between them. An oscillator is supported by an elastic support member(115), such that the oscillator(117) exercises a simple harmonic oscillation in a Z axis. A size, a thickness and the folded number of the elastic support member are changed in the Z axis. The silicon substrate, the insulation layer, and the silicon layer are laminated on an SOI(Silicon On Insulator). The insulation layer is a buried oxide layer. |
