| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multi-axial detection type angular velocity sensor for detecting angular velocities Ωx and Ωz each having their centers of rotation on an X-axis and a Z-axis of a tuning fork type oscillator, an angular velocity having its center of rotation on A Y-axis, and a combinational angular velocity. <P>SOLUTION: The tuning fork type angular velocity sensor uses the tuning fork type oscillator having the X-axis of crystallographic axes (XYZ) as a width, the Y-axis as a length, and the Z-axis as a thickness and comprising both a tuning fork base part and and a pair of tuning fork arms. In the tuning fork type angular velocity sensor, when the angular velocity Ωx having a center of rotation on the X-axis is added to the tuning fork type oscillator, the pair of tuning fork arms are twisted in opposite directions to each other with the center of rotation on the Y-axis to deflect the tuning fork base part. A charge generated by the deflection of the tuning fork base part is detected by a detecting electrode. In addition, the function of detecting the angular velocities Ωx and Ωz each having their centers of rotation on the X-axis and the Z-axis is added to this. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
