发明名称 |
Method for centering a sputter target onto a backing plate and the assembly thereof |
摘要 |
A method for aligning the sputter target onto a backing plate having a peripheral arcuate-shaped flange on its bonding surface to provide an aligned and uniform solder bonded interface; and the sputter target/backing plate assembly so produced.
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申请公布号 |
US7431195(B2) |
申请公布日期 |
2008.10.07 |
申请号 |
US20030670460 |
申请日期 |
2003.09.26 |
申请人 |
PRAXAIR S.T. TECHNOLOGY, INC. |
发明人 |
FACEY JOSEPH C.;WARD IVAN |
分类号 |
B23K31/02;B23K1/00;B23K35/14;B23K35/26;C23C14/34 |
主分类号 |
B23K31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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