MASK SET FOR MICROARRAY, MANUFACTURING METHOD FOR THE SAME, AND MANUFACTURING METHOD OF THE MICROARRAY USING THE MASK SET

摘要

PROBLEM TO BE SOLVED: To provide a mask set where the area of light projected region is controlled. SOLUTION: The mask set includes a plurality of masks for in-situ synthesis probes for microarrays. Each mask includes the light projected region and light-shielding region, the area of the light projected region is 5% or higher with respect to the total area of the light projected region and the light-shielding region. COPYRIGHT: (C)2008,JPO&INPIT