| 摘要 |
The mass spectrometer is characterized in that it has a completely planar design, the components are disposed on a flat non-conductive substrate, it comprises an energy filter (k) for the ions that is configured as a sector, particularly a 90º sector, the ionization chamber (b), the electrodes (g, h, j) for accelerating the electrons and ions, the detector (1) for the ions a nd the energy filter (k) are produced by means of photolithography and etchi ng of a small semiconductor plate doped on the substrate and the wiring, and the above parts are covered by a second flat non-conductive substrate.
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