| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultraviolet sensor capable of improving the sensibility of ultraviolet rays. <P>SOLUTION: The ultraviolet sensor 100 has a silicon substrate 1, and p-type polysilicon layers 4 and n-type polysilicon layers 5 arranged on the silicon substrate 1 at specified intervals in the horizontal direction. The ultraviolet sensor 100 further has silicon nano particle layers 7 arranged so as to be buried to sections among the p-type polysilicon layers 4 and the n-type polysilicon layers 5, capable of detecting ultraviolet rays, and composed of silicon nano particles. <P>COPYRIGHT: (C)2007,JPO&INPIT |
