发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which can suppress a cost increase without complicating a manufacturing process when forming a thin-film transistor using an oxide semiconductor film represented by a zinc oxide, and to provide its manufacturing method. <P>SOLUTION: In the semiconductor device in which a gate electrode is formed on a substrate, a gate insulating film is formed to cover the gate electrode, an oxide semiconductor film is formed on the gate insulating film, and a first conductive film and a second conductive film are formed on the oxide semiconductor film. The oxide semiconductor film has at least a region crystallized in a channel forming region. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007123861(A) 申请公布日期 2007.05.17
申请号 JP20060262991 申请日期 2006.09.27
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 AKIMOTO KENGO;HONDA TATSUYA;SONE HIROTO
分类号 H01L21/336;G02F1/1368;H01L21/20;H01L21/28;H01L29/786 主分类号 H01L21/336
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