| 摘要 |
PROBLEM TO BE SOLVED: To provide an excellent panel member inspection device capable of effectively preventing damages or adhesion of fouling by reduction of the number of times of conveyance of a panel member, while performing a plurality of grade inspections, and improving a processing throughput by shortening of a conveyance time or reduction of the number of times of constraint of an operator. SOLUTION: The device is constituted so that a plurality of inspection recipes applied to the panel member are performed in one-time carrying-in/out process from carrying-in of the panel member from a prescribed storing place until carrying-out thereof. The device includes: a panel mounting stand 3 for mounting the panel member; a plurality of different inspection apparatus 6 capable of executing the plurality of inspection recipes, respectively; a movement control part 8b for controlling relative movement between the panel mounting stand 3 and the inspection apparatus 6 according to the plurality of inspection recipes to be executed; and an inspection recipe execution control part 8c for controlling so that the plurality of inspection recipes to be executed are executed respectively by each corresponding inspection apparatus 6. COPYRIGHT: (C)2007,JPO&INPIT
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