| 摘要 |
PROBLEM TO BE SOLVED: To inspect a substrate to be inspected in a short time while accurate probing is enabled. SOLUTION: This inspection device has a control section that controls a moving mechanism based on positional information of probing points P1-P8 on a circuit board 10 in the X-direction and Y-direction and the height direction from the circuit board 10, and makes a probe probing into the probing points P1-P8. The control section absorbs information of a relative position in the height direction with respect to a reference point Ps of at least three measuring points (probing points P1, P4 and P7) in an inspection region A, and a virtual plane including each measuring point is determined based on the positional information in the X-direction and Y-direction and absorbed information. The positional information in the height direction is corrected so that each of the probing points P2, P3, P5, P6 and P8 different from the measuring points in the inspection region A are positioned on the virtual plane, and the moving mechanism is controlled based on the positional information in the X-direction and Y-direction at the probing time and the positional information in the height direction after correction processing. COPYRIGHT: (C)2007,JPO&INPIT
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